JPH02104559U - - Google Patents
Info
- Publication number
- JPH02104559U JPH02104559U JP1343589U JP1343589U JPH02104559U JP H02104559 U JPH02104559 U JP H02104559U JP 1343589 U JP1343589 U JP 1343589U JP 1343589 U JP1343589 U JP 1343589U JP H02104559 U JPH02104559 U JP H02104559U
- Authority
- JP
- Japan
- Prior art keywords
- cesium
- target
- reservoir
- sputter
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052792 caesium Inorganic materials 0.000 claims description 7
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 claims description 7
- 150000002500 ions Chemical class 0.000 claims 4
- 238000000605 extraction Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1343589U JPH0530276Y2 (en]) | 1989-02-07 | 1989-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1343589U JPH0530276Y2 (en]) | 1989-02-07 | 1989-02-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02104559U true JPH02104559U (en]) | 1990-08-20 |
| JPH0530276Y2 JPH0530276Y2 (en]) | 1993-08-03 |
Family
ID=31223741
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1343589U Expired - Lifetime JPH0530276Y2 (en]) | 1989-02-07 | 1989-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0530276Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006259158A (ja) * | 2005-03-16 | 2006-09-28 | Canon Inc | レンズ鏡筒および光学機器 |
-
1989
- 1989-02-07 JP JP1343589U patent/JPH0530276Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006259158A (ja) * | 2005-03-16 | 2006-09-28 | Canon Inc | レンズ鏡筒および光学機器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0530276Y2 (en]) | 1993-08-03 |